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US 2019/0293185 A1Published application
Control plate for a high conductance valve
AssigneeVistadelTek, LLC
InventorKim Ngoc Vu
Life of this patent
Estimating the term…
Abstract
A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.
Claims20
A valve assembly comprising:
- a valve body having a valve chamber, at least one first fluid conduit aperture in fluid communication with the valve chamber, at least one second fluid conduit aperture in fluid communication with the valve chamber, and at least one pair of adjacent orifice ridge segments, the at least one pair of adjacent orifice ridge segments integral with and extending from the valve body into the valve chamber and defining an intermediate valve chamber portion between the at least one pair of adjacent orifice ridge segments;
- and
- a control plate including a control plate body having a first side and a second side opposed to the first side, the control plate body being movable between a closed position in which a surface region of the first side sealingly contacts the at least one pair of adjacent orifice ridge segments and an open position in which an open gap is present between the surface region and the at least one pair of adjacent orifice ridge segments, the control plate having at least one fluid passageway extending through the control plate body from the first side to the second side within a perimeter of the at least one pair of adjacent orifice ridge segments.
Dependencies are inferred from the claim text.