Device for vertical galvanic metal deposition on a substrate
AssigneeAtotech Deutschland GmbH
InventorRay WEINHOLD
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AssigneeAtotech Deutschland GmbH
InventorRay WEINHOLD
Estimating the term…
Device for vertical galvanic metal deposition on a substrate comprising a first and a second device, arranged vertically parallel to each other; the first device comprising a first anode having a plurality of through-going conduits and a first carrier having a plurality of through-going conduits; wherein said first anode and said first carrier are connected to each other; wherein the second device comprises a first substrate holder adapted to receive a first substrate to be treated, wherein said first substrate holder at least partially surrounds the first substrate along its outer frame, wherein the first device further comprises a plurality of plugs, each plug comprising a through-going channel, each plug arranged such that it runs from the backside of the first carrier through a through-going conduit of the first carrier and further through the conduit of the first anode element, and the plugs are detachably connected to the first device.
Device for vertical galvanic metal deposition on a substrate, wherein the device comprises at least a first device element and a second device element, which are arranged in a vertical manner parallel to each other;
Dependencies are inferred from the claim text.