Gas supply apparatus and gas supply method
AssigneeShowa Denko K.K.
InventorsTakanori AOKI, Katsumi MIKAMI
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Abstract
Provided is a gas supply apparatus for supplying a gas compound obtained by vaporizing a liquid compound to a target location, the gas supply apparatus comprising: a storage vessel capable of storing the liquid compound; a gas compound supply pipeline, one end of which is connected to the storage vessel, and another end of which is capable of being disposed at the target location; and a temperature control device configured to adjust a temperature of the gas compound or the liquid compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.
Claims22
A gas supply apparatus for supplying a gas compound obtained by vaporizing a liquid compound to a target location, the gas supply apparatus comprising:
- a storage vessel capable of storing the liquid compound;
- a gas compound supply pipeline, one end of which is connected to the storage vessel, and another end of which is capable of being disposed at the target location;
- and
- a temperature control device configured to adjust a temperature of the gas compound or the liquid compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.
A gas supply method for supplying a gas compound obtained by vaporizing a liquid compound stored in a storage vessel to a target location through a gas compound supply pipeline, the gas supply method comprising adjusting a temperature of the liquid compound or the gas compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.
(canceled)
Dependencies are inferred from the claim text.