Volatile dihydropyrazinly and dihydropyrazine metal complexes
AssigneeVersum Materials US, LLC
InventorsJohn Anthony Thomas Norman, Sergei Vladimirovich Ivanov, Xinjian Lei
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Abstract
A composition comprising dihydropyrazinyl anions that can be coordinated as 6 electron ligands to a broad range of different metals to yield volatile metal complexes for ALD and CVD depositions are described herein. Also described herein are undeprotonated dihydropyrazines that can coordinate to metals as stabilizing neutral ligands. In one embodiment, the composition is used for the direct liquid injection delivery of the metal dihydropyrazinyl complex precursor to the chamber of an ALD or CVD chamber for the deposition of metal-containing thin films such as, for example, ruthenium or cobalt metal films.
Claims16
A composition comprising a compound having the following Formula 3E comprising:
- wherein R1, R2, R3, R4 are each independently selected from a C1-C6 linear, branched, or cyclic alkyl group;
- R5 is selected from a H atom and a C1-C6 linear, branched, or cyclic alkyl group;
- Q is selected from benzene and an alkylated benzene;
- M is a metal;
- x is 1 or 2;
- y=1;
- and Z is independently selected from a H atom and a C1-C6 linear, branched, or cyclic C1-C6 group, and SiR6 where R6 is a C1-C3 linear or branched, alkyl group.
A method for forming a metal oxide film on a substrate wherein the film comprises a thickness, the method comprising:
- a. introducing a metal dihydropyrazinyl complex comprising Formula 3E;
- b. chemisorbing the metal dihydropyrazinyl complex onto the substrate;
- c. purging away the metal dihydropyrazinyl complex using a purge gas;
- d. providing an oxygen source to the metal dihydropyrazinyl complex onto the heated substrate to react with the sorbed metal dihydropyrazinyl complex containing composition;
- and
- e. optionally purging away any unreacted oxygen source.
A method for forming a metal film on a substrate wherein the film comprises a thickness, the method comprising:
- a. introducing a metal dihydropyrazinyl complex comprising Formula 3E;
- b. chemisorbing the metal dihydropyrazinyl complex onto the substrate;
- c. purging away the metal dihydropyrazinyl complex using a purge gas;
- d. providing a reducing agent to the metal dihydropyrazinyl complex onto the heated substrate to react with the sorbed metal dihydropyrazinyl complex;
- and
- e. optionally purging away any unreacted reducing agent.
Dependencies are inferred from the claim text.