Apparatus and method for transportation of a deposition source
AssigneeApplied Materials, Inc.
InventorsStefan BANGERT, Oliver HEIMEL, Dieter HAAS, Tommaso VERCESI
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Abstract
An apparatus for contactless transportation of a deposition source is provided. The apparatus includes a deposition source assembly. The deposition source assembly includes the deposition source. The deposition source assembly includes a first active magnetic unit. The apparatus includes a guiding structure extending in a source transportation direction. The deposition source assembly is movable along the guiding structure. The first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force for levitating the deposition source assembly.
Claims21
An apparatus for contactless transportation of a deposition source, comprising:
- a deposition source assembly, comprising:
- the deposition source;
- and
- a first active magnetic unit;
- and
- a guiding structure with magnetic properties extending in a source transportation direction, wherein the deposition source assembly is movable along the guiding structure, wherein the first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force (FI) for levitating the deposition source assembly, wherein the apparatus further comprise a controller configured for controlling the first active magnetic unit to align the deposition source in a vertical direction (Y).
(canceled)
An apparatus for contactless levitation of a deposition source, comprising:
- a deposition source assembly having a first rotation axis, wherein the deposition source assembly comprises:
- a deposition source;
- a first active magnetic unit arranged at a first side of the deposition source assembly;
- and
- a second active magnetic unit arranged at a second side of the deposition source assembly;
- a guiding structure including a passive magnetic unit;
- and
- a controller configured for controlling the first active magnetic unit and the second active magnetic unit, wherein the first active magnetic unit and the second active magnetic unit are configured for magnetically levitating the deposition source assembly and for rotating the deposition source around the first rotation axis for alignment of the deposition source.
A method for contactlessly aligning a deposition source, comprising:
- generating an adjustable magnetic field with an active magnetic unit to levitate the deposition source;
- and
- controlling the adjustable magnetic field with a controller to align the deposition source.
A method for contactlessly aligning a deposition source, comprising:
- providing a first magnetic levitation force (FI) with a first active magnetic unit and a second magnetic levitation force (F2) with a second active magnetic unit to levitate the deposition source, wherein the first magnetic levitation force is spaced from the second magnetic levitation force;
- and
- controlling at least one of the first magnetic levitation force and the second magnetic levitation force with a controller to align the deposition source.
Dependencies are inferred from the claim text.