Chemical mechanical polishing composition and method of manufacturing circuit board
AssigneeJsr Corporation
InventorsEiichirou KUNITANI, Kazuhiro TANAKA, Masahiro NODA, Tatsuya YAMANAKA
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AssigneeJsr Corporation
InventorsEiichirou KUNITANI, Kazuhiro TANAKA, Masahiro NODA, Tatsuya YAMANAKA
Estimating the term…
Provided is a chemical mechanical polishing composition to be used for forming a circuit board including a resin substrate on which a wiring layer containing copper or a copper alloy is provided, the chemical mechanical polishing composition including: (A) at least one selected from a group consisting of organic acids and salts thereof; (B) a phosphorus-containing compound; and (C) abrasive grains each having an absolute value of a zeta potential in the composition of 5 mV or more, wherein, when a content of the component (A) in the composition is represented by MA mass % and a content of the component (B) therein is represented by MB mass %, a ratio MA/MB of the content of the component (A) to the content of the component (B) ranges from 1 to 10, and wherein the chemical mechanical polishing composition has a pH value of from 1 to 3.
A chemical mechanical polishing composition to be used for forming a circuit board including a resin substrate on which a wiring layer containing copper or a copper alloy is provided, the chemical mechanical polishing composition comprising:
Dependencies are inferred from the claim text.