Method of forming a thin film
AssigneeAdeka Corporation
InventorsGyu-hee PARK, Youn-soo KIM, Jae-soon LIM, Youn-joung CHO, Haruyoshi SATO, Naoki YAMADA, Hiroyuki UCHIUZOU
Life of this patent
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Abstract
A silicon-containing intermediate is synthesized by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene. A lanthanum compound is synthesized by reacting the silicon-containing intermediate with a dialkylamidine-based compound.
Claims41
A synthesis method, the method comprising:
- synthesizing a silicon-containing intermediate of Chemical Formula 1 by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene,
- wherein R1 is a C1-C4 linear or branched alkyl group, and each RX is independently a C1-C2 alkyl group;
- and
- synthesizing a lanthanum compound of Chemical Formula 2 by reacting the silicon-containing intermediate of Chemical Formula 1 with a carbodiimide-based compound,
- wherein R1 is a C1-C4 linear or branched alkyl group, each of R2 and R3 is independently a C1-C4 linear or branched alkyl group, and R4 is hydrogen atom or a methyl group.
A lanthanum precursor composition, the composition comprising a lanthanum compound represented by the following chemical formula:
- wherein R1 is a C1-C4 linear or branched alkyl group, each of R2 and R3 is independently a C1-C4 linear or branched alkyl group, and R4 is hydrogen or a methyl group.
A method of forming a thin film, the method comprising:
- forming a lanthanum-containing film on a substrate by using a lanthanum compound that is a liquid at room temperature, the lanthanum compound being represented by the following Chemical Formula 2:
- wherein R1 is a C1-C4 linear or branched alkyl group, each of R2 and R3 is independently a C1-C4 linear or branched alkyl group, and R4 is hydrogen or a methyl group.
A method of manufacturing an integrated circuit (IC) device, the method comprising:
- forming a lower structure on a substrate;
- and
- forming a lanthanum-containing film on the lower structure by using a lanthanum compound which is a liquid at room temperature and represented by the following Chemical Formula 2:
- wherein R1 is a C1-C4 linear or branched alkyl group, each of R2 and R3 is independently a C1-C4 linear or branched alkyl group, and R4 is hydrogen or a methyl group.
A compound represented by the following Chemical Formula 1:
- wherein R1 is a C1-C4 linear or branched alkyl group, and each RX is independently a C1-C2 alkyl group.
Dependencies are inferred from the claim text.