Sensor characteristic evaluation method and charged particle beam device

A charged particle beam device, comprising:

• a charged particle beam discharging unit which discharges a charged particle beam;
• a stage which holds a substrate;
• a current measuring unit which measures a leakage current from the substrate;
• a time measuring unit which measures a time to emit the charged particle beam and a time to measure the leakage current;
• and
• a control unit which synchronizes a time to emit the charged particle beam discharged from the charged particle beam discharging unit and a time to measure the leakage current by the current measuring unit, wherein
• the control unit synchronizes the time to emit the charged particle beam discharged from the charged particle beam discharging unit and the time to measure the leakage current by the current measuring unit, and emits the charged particle beam to the substrate in this state, and
• the current measuring unit measures the leakage current from the substrate to evaluate a sensor formed in the substrate.