Liquid discharge head and method of manufacturing liquid discharge head

A method of manufacturing a liquid discharge head, comprising:

• forming a stacked body having a piezoelectric element, a trace, a liquid flow channel, a first space, and a second space and a third space which are arranged to sandwich the first space therebetween in a first direction,
• the piezoelectric element being positioned in one of the second space and the third space,
• the trace having a first connecting terminal and a second connecting terminal,
• the first connecting terminal of the trace being connected to the piezoelectric element in one of the second space and the third space,
• the second connecting terminal of the trace being positioned in the first space,
• the first space, the second space, and the third space being sealed separately from one another, or, the second space and the third space being connected, and the connected second and third spaces and the first space are sealed separately;
• forming a protective film by an atomic layer deposition on a surface defining the liquid flow channel of the stacked body;
• and
• making the first space to be unsealed after forming the protective film.

A liquid discharge head, comprising:

• a vibration plate;
• a piezoelectric element provided on the vibration plate;
• a trace formed on the vibration plate and having a first connecting terminal and a second connecting terminal;
• and
• a protective member provided on the vibration plate and configured to protect the piezoelectric element,
• wherein the protective member has a lower surface facing the vibration plate, an upper surface on a side opposite to the lower surface, and a lateral surface between the lower surface and the upper surface,
• the lower surface of the protective member has a recess,
• the piezoelectric element is accommodated in a protective space defined by the recess and the vibration plate,
• the lateral surface of the protective member has a first surface and a second surface facing the first surface with the protective space being interposed therebetween,
• the first connecting terminal of the trace is connected to the piezoelectric element in the protective space,
• the first surface of the protective member is positioned between the first connecting terminal and the second connecting terminal of the trace,
• a protective film is formed on the second surface of the protective member, and
• the protective film is not formed on the first surface of the protective member.

A liquid discharge head, comprising:

• a vibration plate;
• a piezoelectric element provided on the vibration plate;
• a trace formed on the vibration plate and having a first connecting terminal and a second connecting terminal;
• and
• a protective member provided on the vibration plate and protecting the piezoelectric element,
• wherein the protective member has a lower surface facing the vibration plate, an upper surface opposite to the lower surface, and a lateral surface between the lower surface and the upper surface,
• the lower surface of the protective member has a recess,
• the piezoelectric element is accommodated in a protective space defined by the recess and the vibration plate,
• the lateral surface of the protective member has a first surface, and a second surface facing the first surface with the protective space being interposed therebetween,
• the first connecting terminal of the trace is connected to the piezoelectric element in the protective space,
• the first surface of the protective member is positioned between the first connecting terminal and the second connecting terminal of the trace,
• a protective film is formed on the first surface and the second surface of the protective member, and
• a portion, of the protective film, positioned on the first surface of the protective member has a thickness smaller than a thickness of another portion, of the protective film, positioned on the second surface of the protective member.