Grinding apparatus
AssigneeDisco Corporation
InventorShinji YOSHIDA
Life of this patent
Estimating the term…
Abstract
A grinding apparatus includes a table having a holding surface, a grinding unit grinding a wafer held on the holding surface, a notification portion notifying an operator of information, an imaging unit illuminating a ground surface of the wafer which is held and ground with an illumination and imaging the ground surface, a detecting portion detecting a cross line in an imaged picture, a memory storing an X-axis and Y-axis coordinate position of an intersection point of the cross line detected, a spotlight illuminating the holding surface at the X-axis and Y-axis coordinate position stored, and a controller causing the notification portion to notify the operator that the cross line has been detected and stopping grinding operations of the grinding apparatus.
Claims1
A grinding apparatus comprising:
- a holding table including a porous plate having a holding surface on which a wafer is held;
- holding table rotation means rotating the holding table with a center of the holding table as an axis for rotation;
- grinding means grinding the wafer held on the holding surface with grinding stones;
- notification means notifying an operator of various kinds of information;
- imaging means illuminating a ground surface of the wafer which is held on the holding surface and ground with the grinding stones with an illumination and imaging the ground surface;
- detecting means detecting a cross line in a picture imaged by the imaging means;
- storage means storing an X-axis and Y-axis coordinate position of an intersection point of the cross line detected by the detecting means;
- a spotlight illuminating the holding surface at the X-axis and Y-axis coordinate position stored in the storage means;
- and
- control means causing the notification means to notify the operator that the detecting means has detected the cross line and stopping grinding operations of the grinding apparatus.
Dependencies are inferred from the claim text.