Film forming apparatus and gas-liquid separating apparatus
AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorsRempei Nakata, Hidenori Hanyu
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AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorsRempei Nakata, Hidenori Hanyu
Estimating the term…
A film forming apparatus according to an embodiment includes a reaction chamber; a first pipe having first end portion and second end portion, the first end portion being connected to the reaction chamber, the first pipe extending in a first direction, and having a first opening area in cross-section perpendicular to the first direction; a second pipe disposed such that the first pipe is provided between the reaction chamber and the second pipe, the second pipe having third end portion and fourth end portion, and the second pipe extending in a second direction different from the first direction; a narrow portion provided in the first pipe and having a second opening area smaller than the first opening area in cross-section perpendicular to the first direction; and a liquid storage portion located on an imaginary straight line extending from a center of the second end portion in the first direction.
A film forming apparatus comprising:
The film forming apparatus according to claim wherein a third opening area of the recessed portion in cross-section perpendicular to the first direction is larger than the second opening area.
A gas-liquid separating apparatus comprising:
Dependencies are inferred from the claim text.