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US 2019/0291027 A1Published application
Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame
AssigneeEntegris, Inc.
InventorsTom LEBLANC, Joe WILDGOOSE, Marc VENET, Evan WARNIERS, John GAUDREAU
Life of this patent
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Abstract
Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.
Claims12
A filter cartridge system for control of airborne molecular contamination, the filter cartridge system comprising:
- a filter cartridge comprising a non-woven fiber and at least one adsorbent, the filter cartridge comprising substantially combustible materials;
- and
- a reusable case for the filter cartridge, the filter cartridge being readily separable from the reusable case for disposal.
Dependencies are inferred from the claim text.