Arrangement and method for wavefront analysis

Abstract

The present invention relates to an arrangement and to a method for wavefront analysis comprising a radiation source (8) that emits an electromagnetic wavefront of electromagnetic radiation (1) to be analyzed; a spatially resolving detector unit (4, 4a, 4b, 4c) for detecting the electromagnetic wavefront; and an electronic evaluation unit (5, 7) connected to the detector unit (4, 4a, 4b, 4c). The at least one beam guidance unit (3) for guiding the electromagnetic radiation (1), that is only diffractive and/or reflective, has at least one opening (3a, 3b, 3c) and the detector unit (4, 4a, 4b, 4c) is arranged behind the at least one opening (3a, 3b, 3c) of the beam guidance unit (3) in the direction of propagation of the electromagnetic radiation (1) for detecting a diffraction pattern of the electromagnetic radiation (1) diffracted at the at least one opening (3a, 3b, 3c).

Dependencies are inferred from the claim text.