Gas supply vessel
AssigneeEntegris, Inc.
InventorsJoseph Robert DESPRES, Edgar Daniel LA BORDE, Robert ZELLER
Life of this patent
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Abstract
A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.
Claims16
A gas supply vessel for storing and dispensing a reagent gas, the vessel comprising:
- an interior volume,
- adsorbent within the interior volume,
- reagent gas within the interior volume, the reagent gas comprising a portion that is adsorbed on the adsorbent, and a portion that is present as gaseous reagent gas in equilibrium with the adsorbed reagent gas,
- at least one valve in communication with the interior volume having an valve inlet and a valve outlet,
- an outlet in communication with the interior volume, and
- a filter in a flow path between the interior volume and the outlet, the filter comprising a porous sintered body, wherein the filter has a log reduction value of at least 4 at a particular MPPS, at a flow rate of 20 standard cubic centimeters per minute.
A gas supply vessel for storing and dispensing a reagent gas, the vessel comprising:
- an interior volume,
- at least one pressure regulator disposed in the interior volume,
- a valve in communication with the interior volume the valve having a having a valve inlet and a valve outlet, and
- a filter in a flow path between the interior volume and the outlet, the filter comprising a porous sintered body, wherein the filter has a log reduction value of at least 4 at a particular MPPS, at a flow rate of 20 standard cubic centimeters per minute.
Dependencies are inferred from the claim text.