Method for stabilizing chlorosilane polymer
AssigneeIHI Corporation
InventorsYasutomo TANAKA, Yuuta OOTSUKA, Wataru KUBOTA, Masato ISHIZAKI, Kozue AKAZAKI
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Abstract
This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method including: a step of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide with the alcohol; and a step of performing hydrolysis for the alkoxide.
Claims8
A method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method comprising:
- a step of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide, hydrogen chloride and hydrogen with the alcohol;
- and
- a step of performing hydrolysis for the alkoxide.
Dependencies are inferred from the claim text.