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US 2019/0252146 A1Published application
Planar Field Emission Transistor
AssigneeWiSys Technology Foundation, Inc.
InventorsCharles D. Nelson, Harold T Evensen
Life of this patent
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Abstract
A field emission transistor uses carbon nanotubes positioned to extend along a substrate plane rather than perpendicularly thereto. The carbon nanotubes may be pre-manufactured and applied to the substrate and then may be etched to create a gap between the carbon nanotubes and an anode through which electrons may flow by field emission. A planar gate may be positioned beneath the gap to provide a triode structure.
Claims19
A field emission transistor comprising:
- a planar substrate;
- a first and second electrode supported by the substrate in spaced opposition across a separation region extending along a plane of the substrate;
- a plurality of carbon nanotubes in electrical communication with the first electrode and extending from the first electrode toward the second electrode to terminate at a free space region in the separation region;
- and
- a gate electrode for establishing an electrical field in the free space region;
- wherein electrons may be transmitted between the first and second electrodes by a combination of electrical conduction through the plurality of carbon nanotubes and field emissions in the free space region, the latter controllable by the gate electrode.
3 more elements
A method of fabricating a field emission transistor comprising:
- applying a plurality of carbon nanotubes to an insulating surface of a substrate;
- etching a gap in the carbon nanotubes to define a free space region;
- applying a first electrode to the substrate in electrical communication with the carbon nanotubes on one side of the free space region;
- applying a second electrode to the substrate separated from the carbon nanotubes in communication with the first electrode by the free space region;
- applying a gate electrode to the substrate positioned to establish a controlling electrical field within the free space region;
- and
- transmitting electrons between the first and second electrodes by a combination of electrical conduction through the plurality of carbon nanotubes and field emissions in the free space region, the latter controllable by the gate electrode.
4 more elements
Dependencies are inferred from the claim text.