Polishing tool wear amount prediction device, machine learning device, and system
AssigneeFanuc Corporation
InventorHe ZHANG
Life of this patent
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Abstract
A polishing tool wear amount prediction device, machine learning device, and system capable of predicting a wear amount of a polishing tool unit of a polishing tool during polishing are provided. The polishing tool wear amount prediction device includes a machine learning device which observes polishing condition data indicating a processing condition of polishing as a state variable indicating a current environment state and performs, based on the state variable, learning or prediction by using a learning model which stores a correlation of the wear amount of the polishing tool with respect to the processing condition of polishing.
Claims14
A polishing tool wear amount prediction device which predicts a wear amount of a polishing tool in polishing on a work by the polishing tool, the polishing tool wear amount prediction device comprising:
- a machine learning device which observes polishing condition data indicating a processing condition of the polishing as a state variable indicating a current environment state and performs, based on the state variable, learning or prediction by using a learning model in which the wear amount of the polishing tool is modeled with respect to the processing condition of the polishing.
A machine learning device which observes polishing condition data indicating a processing condition of polishing on a work by a polishing tool as a state variable indicating a current environment state and performs, based on the state variable, learning or prediction by using a learning model in which a wear amount of the polishing tool is modeled with respect to the processing condition of the polishing.
Dependencies are inferred from the claim text.