Tool set for use in position adjustment of positioning pins
AssigneeEbara Corporation
InventorHiroaki NISHIDA
Life of this patent
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Abstract
A tool set that can easily check positions of positioning pins for a workpiece even in an environment using a liquid is disclosed. The tool set includes: a reference tool to be placed on the holding stage; a dummy workpiece to be placed on the reference tool; and a check pin having a cylindrical circumferential surface. The reference tool has a central protrusion having a cylindrical circumferential surface. The dummy workpiece has a circular through-hole having a diameter larger than a diameter of the circumferential surface of the central protrusion. A diameter of the check pin is smaller than a value determined by dividing a difference between the diameter of the circular through-hole and the diameter of the circumferential surface of the central protrusion by 2.
Claims5
A tool set for use in adjusting positions of positioning pins arranged around a holding stage for holding a workpiece, comprising:
- a reference tool to be placed on the holding stage;
- a dummy workpiece to be placed on the reference tool;
- and
- a check pin having a cylindrical circumferential surface,
- wherein the reference tool has a central protrusion having a cylindrical circumferential surface,
- the dummy workpiece has a circular through-hole having a diameter larger than a diameter of the circumferential surface of the central protrusion,
- an outer edge of the dummy workpiece and the through-hole are concentric, and
- a diameter of the check pin is smaller than a value determined by dividing a difference between the diameter of the circular through-hole and the diameter of the circumferential surface of the central protrusion by 2.
Dependencies are inferred from the claim text.