A strain sensing element, having a first and second magnetic layer and a third layer that is antiferrimagnetic
AssigneeKabushiki Kaisha Toshiba
InventorsYoshihiko Fuji, Hideaki Fukuzawa, Shiori Kaji
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Abstract
According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.
Claims20
A strain sensing element provided on a deformable substrate, comprising:
- a first layer having a first magnetization;
- a second layer having a second magnetization to change according to a deformation of the substrate;
- an intermediate layer provided between the first layer and the second layer;
- and
- a third layer,
- the second layer being provided between the intermediate layer and the third layer,
- at least a part of the third layer being antiferromagnetic.
A pressure sensor comprising:
- a support unit;
- a substrate supported by the support unit, the substrate being deformable;
- and
- a strain sensing element provided on the substrate, the strain sensing element including
- a first layer having a first magnetization,
- a second layer having a second magnetization to change according to a deformation of the substrate,
- an intermediate layer provided between the first layer and the second layer, and
- a third layer,
- the second layer being provided between the intermediate layer and the third layer,
- at least a part of the third layer being anti-ferromagnetic.
Dependencies are inferred from the claim text.