Elastic wave device, front-end circuit, and communication device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYutaka KISHIMOTO, Tetsuya KIMURA
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Abstract
An elastic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction. The piezoelectric substrate includes a groove extending along the elastic wave propagation direction. The groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the electrode fingers are located.
Claims20
An elastic wave device comprising:
- a piezoelectric substrate;
- and
- an IDT electrode provided on the piezoelectric substrate;
- wherein
- the IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and a plurality of electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction;
- the piezoelectric substrate includes at least one groove extending along the elastic wave propagation direction;
- and
- the at least one groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the plurality of electrode fingers are provided.
Dependencies are inferred from the claim text.