High-Power Short-Pass Total Internal Reflection Filter
AssigneeKLA-Tencor Corporation
InventorsWei Zhao, Ilya Bezel
Life of this patent
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Abstract
An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
Claims39
An apparatus for generating filtered light comprising:
- one or more pump sources configured to generate pump illumination;
- a focusing element arranged to focus the pump illumination onto a plasma target to generate a plasma that emits broadband illumination;
- a collector element arranged to collect the broadband illumination from the plasma;
- and
- a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination, the TIR filter including one or more input faces oriented to receive the broadband illumination and one or more filtering faces oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength as filtered broadband illumination, wherein the cutoff wavelength is selected based on total internal reflection on the one or more filtering faces, wherein the filtered broadband illumination beam exits the TIR filter through one or more output faces.
An apparatus for generating filtered light comprising:
- a broadband illumination source configured to generate broadband illumination;
- and
- a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination, the TIR filter including one or more input faces oriented to receive the broadband illumination, wherein TIR filter is oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination, wherein the cutoff wavelength is selected based on total internal reflection on the one or more faces, wherein the filtered broadband illumination beam exits the TIR filter through one or more output faces.
A total internal reflection (TIR) filter comprising:
- a solid material comprising:
- one or more input faces oriented to receive broadband illumination, wherein the solid material is at least partially transparent to the broadband illumination;
- one or more filtering faces oriented to reflect wavelengths of the broadband illumination beam propagating through the solid material below a selected cutoff wavelength as filtered broadband illumination, wherein the cutoff wavelength is selected based on total internal reflection on the one or more faces;
- and
- one or more output faces oriented to receive the filtered broadband illumination and direct the filtered broadband illumination as an output beam.
Dependencies are inferred from the claim text.