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US 2019/0227102 A1Published application
Probes with fiducial targets, probe systems including the same, and associated methods
AssigneeFormFactor Beaverton, Inc.
InventorsJoseph George Frankel, Koby L. Duckworth, Kazuki Negishi
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Abstract
Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.
Claims31
A probe for a probe system, the probe comprising:
- a probe body;
- a probe beam extending from the probe body;
- at least one probe tip extending from a leading edge of the probe beam distal the probe body and configured to contact a device under test (DUT);
- and
- at least one fiducial target affixed to the probe beam;
- wherein the fiducial target is configured to be visible to an optical system when the probe tip approaches the DUT to facilitate determining a position of the at least one probe tip relative to the DUT;
- and wherein the fiducial target is configured to be more optically resolvable by the optical system relative to at least a portion of the probe beam that is adjacent to the fiducial target.
4 more elements
A method of manufacturing a probe with a fiducial target, the method comprising:
- providing a probe that has a probe beam and at least one probe tip;
- and
- affixing a fiducial target to the probe beam;
- wherein the fiducial target is configured to be visible to an optical system when the probe tip approaches a device under test (DUT) to facilitate determining a position of the at least one probe tip relative to the DUT;
- and wherein the fiducial target is configured to be more optically resolvable by the optical system relative to at least a portion of the probe beam that is adjacent to the fiducial target.
2 more elements
Dependencies are inferred from the claim text.