Pattern forming material and pattern forming method
AssigneeToshiba Memory Corporation
InventorsRyosuke YAMAMOTO, Seiji Morita, Norikatsu Sasao, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
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Abstract
A pattern forming material according to an embodiment is a pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other. Each of the monomer units includes an ester structure having a first carbonyl group and at least one second carbonyl group bonded to the ester structure. A second carbonyl group farthest from a main chain of the polymer constituting the pattern forming material among second carbonyl groups is in a linear chain state.
Claims15
A pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other, wherein
- each of the monomer units includes:
- an ester structure having a first carbonyl group;
- and
- at least one second carbonyl group bonded to the ester structure, and
- a second carbonyl group among second carbonyl groups, which is farthest from a main chain of the polymer constituting the pattern forming material, is in a linear chain state.
A pattern forming method using a pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other,
- the polymer comprising the bonded monomer units each including:
- an ester structure having a first carbonyl group;
- and at least one second carbonyl group bonded to the ester structure, and a second carbonyl group among second carbonyl groups, which is farthest from a main chain of the polymer constituting the pattern forming material, being in a linear chain state,
- the method comprising:
- forming the pattern forming material on a processing target material;
- patterning the pattern forming material;
- exposing the patterned pattern forming material to gas or liquid of a metallic precursor to cause the pattern forming material to contain metal;
- and
- processing the processing target material using the pattern forming material containing the metal as a mask.
Dependencies are inferred from the claim text.