Variable resolution spectrometer
AssigneeKLA-Tencor Corporation
InventorMark Allen Neil
Life of this patent
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AssigneeKLA-Tencor Corporation
InventorMark Allen Neil
Estimating the term…
Systems, methods, apparatuses, and articles of manufacture are provided for recovering a digitized spectrum and may comprise: an optical system configured to transform rays, the optical system including a diffraction grating, a steering mirror, a stage, and an actuator configured to move one of the stage, diffraction grating, or steering mirror according to a movement regime to vary an incidence of the rays on the stage; a sensor array disposed on the stage configured to receive the rays incident from the optical system at a plurality of measurement locations to obtain a plurality of ray spectra; and a processor electrically connected to the sensor array configured to receive the ray spectra, interleave the ray spectra to yield an interleaved spectrum, and deconvolve a point spread function corresponding to the optical system from the interleaved spectrum to yield a recovered digitized spectrum.
A variable resolution spectrometer, comprising:
A method for recovering a digitized spectrum, comprising:
A non-transitory computer-readable storage medium, comprising one or more programs for executing the following steps on one or more computing devices:
Dependencies are inferred from the claim text.