Turbomolecular pump lubricant supply systems
AssigneeEdwards Limited
InventorNicola Perrino
Life of this patent
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Abstract
A turbomolecular pump has a housing, a rotor shaft supported by a plurality of bearings for rotation relative to the housing about an axis of rotation, a deflector, a lubricant supply system and a lubricant transfer device provided on the rotor shaft. The bearings include a rolling bearing that receives lubricant from the lubricant supply system to via the lubricant transfer device. The rolling bearing is disposed intermediate the lubricant transfer device and the deflector and the deflector is configured to deflect lubricant that passes through the rolling bearing outwardly with respect to the rotor shaft.
Claims15
A turbomolecular pump comprising:
- a housing;
- a pumping mechanism disposed in said housing, said pumping mechanism comprising a rotor shaft having an axis of rotation;
- a plurality of bearings supporting said rotor shaft for rotation relative to said housing about said axis of rotation, said plurality of bearings including a rolling bearing;
- a deflector;
- a lubricant supply system;
- and
- a lubricant transfer device provided on said rotor shaft to transfer lubricant from said lubricant supply system to said rolling bearing,
- wherein said rolling bearing is disposed intermediate said lubricant transfer device and said deflector and said deflector is configured to deflect lubricant that passes through said rolling bearing outwardly with respect to said rotor shaft.
Dependencies are inferred from the claim text.