Target supply apparatus
AssigneeGigaphoton Inc.
InventorMasaki NAKANO
Life of this patent
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Abstract
A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.
Claims19
A target supply apparatus comprising:
- a nozzle configured to output a target;
- a plurality of vibrators including a first vibrator configured to vibrate the nozzle;
- a detection unit configured to detect a change in state of the target having been output from the nozzle;
- a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator;
- and
- a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.
A target supply apparatus comprising:
- a nozzle configured to output a target;
- a plurality of vibrators including a second vibrator configured to vibrate the nozzle and a third vibrator configured to detect vibration of the nozzle;
- a detection unit including the third vibrator, the detection unit being configured to output a detection signal representing the vibration of the nozzle;
- a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the second vibrator to the other vibrator that is included in the vibrators and is different from the second vibrator;
- and
- a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the detection signal output from the detection unit.
A target supply apparatus comprising:
- a nozzle configured to output a target;
- a plurality of vibrators including a fourth vibrator configured to vibrate the nozzle;
- a detection unit configured to detect vibration of the nozzle and output a detection signal representing vibration of the nozzle;
- a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the fourth vibrator to the other vibrator that is included in the vibrators and is different from the fourth vibrator;
- and
- a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the detection signal output from the detection unit.
A target supply apparatus comprising:
- a nozzle configured to output a target;
- a plurality of vibrators including a fifth vibrator configured to vibrate the nozzle;
- a detection unit including at least one of a vibration number-of-times measuring unit configured to measure a vibration number-of-times of the fifth vibrator and a vibration period measuring unit configured to measure a vibration period of the fifth vibrator;
- a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the fifth vibrator to the other vibrator that is included in the vibrators and is different from the fifth vibrator;
- and
- a control unit configured to allow the vibration switching unit to perform the switching of the vibrator that vibrates the nozzle to the other vibrator different from the fifth vibrator, when the vibration number-of-times of the fifth vibrator measured by the vibration number-of-times measuring unit reaches a prescribed value of the vibration number-of-times that has been prescribed in advance, or when the vibration period of the fifth vibrator measured by the vibration period measuring unit reaches a prescribed value of the vibration period that has been prescribed in advance.
Dependencies are inferred from the claim text.