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US 2019/0200442 A1Published application
Apparatus for and method of source material delivery in a laser produced plasma euv light source
AssigneeASML Netherlands B.V.
InventorsAlexander Igorevich ERSHOV, David Evans, Matthew Graham
Life of this patent
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Abstract
A device and method are disclosed in which a source material delivery system can be reoriented so that the path of the source material is not directly towards an irradiation region in operating conditions in which the path is expected to be unpredictable. A shroud provided to protect the flow of source material from being disrupted is segmented so with one part of the shroud being movable with respect to another part of the shroud so that the movable part can avoid interfering with the path of the source material when it is not directly towards the irradiation region.
Claims20
A system comprising:
- a droplet generator configured to deliver source material along a path to an irradiation site;
- and
- a shroud arranged between the droplet generator and the irradiation site, the shroud having a
- first portion configured to extend substantially parallel to and along a portion of the path and
- a second portion which is movable with respect to the first portion between a first position in which the second portion is configured to extend substantially parallel to and along a portion of the path and engages the first portion to form a seal between the first portion and the second portion and a second position in which the second portion is at least partially spaced and angled away from the first portion.
2 more elements
A system comprising:
- a droplet generator configured to deliver source material along a path to an irradiation site;
- and
- a shroud arranged at least partially around a portion of the path, the shroud having a
- first portion extending substantially parallel to and along a portion of the path and
- a second portion which is movable with respect to the first portion between a first position in which the second portion is configured to extend substantially parallel to and along a portion of the path and engages the first portion to form a seal between the first portion and the second portion and a second position in which the second portion is at least partially spaced and angled away from the first portion.
2 more elements
A system comprising:
- a droplet generator configured to deliver source material along a path to an irradiation site;
- a shroud arranged at least partially around a portion of the path, the shroud having a
- first portion extending substantially parallel to and along a portion of the path and
- a second portion which is movable with respect to the first portion between a first position in which the second portion is configured to extend substantially parallel to and along a portion of the path and engages the first portion to form a seal between the first portion and the second portion and a second position in which the second portion is at least partially spaced and angled away from the first portion, wherein the second portion is mechanically coupled with the droplet generator so that the second portion moves with the droplet generator;
- and
- a gas delivery system adapted to cause gas to flow along at least a portion of the path.
3 more elements
A system comprising:
- a droplet generator configured to direct droplets of a source material alternatively along a first path including an irradiation site and a second path not including the irradiation site;
- a shroud arranged at least partially around a portion of the path, the shroud having a
- first portion extending substantially parallel to and along a portion of the first path and
- a second portion which is movable with respect to the first portion between a first position in which the second portion extends substantially parallel to and along a portion of the first path and engages the first portion to form a seal between the first portion and the second portion and a second position in which the second portion extends substantially parallel to and along a portion of the second path to be at least partially spaced and angled away from the first portion, wherein the second portion is mechanically coupled with the droplet generator so that the second portion moves with the droplet generator;
- and
- a gas delivery system adapted to cause gas to flow along at least a portion of the first path.
3 more elements
Dependencies are inferred from the claim text.