Alignment apparatus, lithography apparatus, and article manufacturing method

A lithography apparatus comprising an alignment apparatus that performs alignment of a substrate by detecting a mark provided on the substrate,

• the alignment apparatus comprising:
• a stage configured to move while holding the substrate;
• an imaging device configured to capture an image of the mark on the substrate held by the stage;
• and
• a processor configured to obtain a position of the mark based on the image of the mark captured by the imaging device,
• wherein the imaging device includes
• an image sensor configured to accumulate charge by photoelectric conversion, and
• a storage device configured to temporarily store image data obtained based on the charge accumulated by the image sensor,
• the imaging device is configured to perform next image capturing after the image sensor performs accumulation of the charge and transfer of image data obtained by the accumulation to the storage device is completed, and
• the alignment apparatus moves the stage for next image capturing concurrently with transfer of the image data to the storage device when capturing an image of the mark using the imaging device at a plurality of positions while moving the stage,
• wherein a pattern of an original is transferred onto a substrate held by the stage of the alignment apparatus.

An article manufacturing method comprising:

• forming a pattern on a substrate by using a lithography apparatus;
• and
• processing the substrate on which the pattern has been formed,
• wherein an article is manufactured from the processed substrate,
• wherein the lithography apparatus comprises an alignment apparatus that performs alignment of a substrate by detecting a mark provided on the substrate,
• the alignment apparatus comprising:
• a stage configured to move while holding the substrate;
• an imaging device configured to capture an image of the mark on the substrate held by the stage;
• and
• a processor configured to obtain a position of the mark based on the image of the mark captured by the imaging device,
• wherein the imaging device includes
• an image sensor configured to accumulate charge by photoelectric conversion, and
• a storage device configured to temporarily store image data obtained based on the charge accumulated by the image sensor,
• the imaging device is configured to perform next image capturing after the image sensor performs accumulation of the charge and transfer of image data obtained by the accumulation to the storage device is completed, and
• the alignment apparatus moves the stage for next image capturing concurrently with transfer of the image data to the storage device when capturing an image of the mark using the imaging device at a plurality of positions while moving the stage.