Methods for thermal management in amplifiers
AssigneeSkyworks Solutions, Inc.
InventorsMichael Joseph McPartlin, Bharatjeet Singh Gill
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Abstract
Methods of managing heat generated by amplifiers are disclosed. A metal pillar, a plurality of resistors, and a transistor array are formed over a silicon substrate. The plurality of resistors provide emitter-ballasting for the amplifier. A footprint defined by a periphery of the metal pillar is adjacent to a footprint defined by a periphery of the transistor array and overlaps a footprint defined by a periphery of the plurality of resistors so that heat generated during operation of the amplifier is transferred through the silicon substrate to the metal pillar.
Claims20
A method for thermal management of an amplifier, the method comprising:
- forming a transistor array over a silicon substrate;
- and
- forming a metal pillar over the silicon substrate such that a footprint defined by a periphery of the metal pillar is adjacent to a footprint defined by a periphery of the transistor array, heat generated during operation of the transistor array being transferred through the silicon substrate to the metal pillar.
A method for thermal management of a flip chip implementation of an amplifier, the method comprising:
- forming a transistor array and a plurality of first resistors over a silicon substrate, a first end of a resistor of the plurality of first resistors in communication with an emitter of a transistor of the transistor array;
- and
- forming a metal pillar over the silicon substrate such that a footprint defined by a periphery of the metal pillar is adjacent to a footprint defined by a periphery of the transistor array and overlaps a footprint defined by a periphery of the plurality of first resistors, a second end of the resistor of the plurality of first resistors in communication with the metal pillar, heat generated during operation of the transistor of the transistor array being transferred through the silicon substrate to the metal pillar.
Dependencies are inferred from the claim text.