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US 2019/0199242 A1Published application
Mems actuation system
AssigneeMems Drive (Nanjing) Co., Ltd.
InventorsGUIQIN WANG, Xiaolei Liu
Life of this patent
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Abstract
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.
Claims20
A multi-axis MEMS assembly comprising:
- a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement;
- and
- an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.
A multi-axis MEMS assembly comprising:
- a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
- an in-plane MEMS actuator, and
- an out-of-plane MEMS actuator including a plurality of distinct actuation regions;
- and
- an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.
2 more elements
A multi-axis MEMS assembly comprising:
- a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
- an in-plane MEMS actuator configured to provide linear X-axis movement, linear Y-axis movement and rotational Z-axis movement, and
- an out-of-plane MEMS actuator configured to provide linear Z-axis movement and including a piezoelectric actuator;
- and
- an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.
2 more elements
Dependencies are inferred from the claim text.