Correlated electron device formed via conversion of conductive substrate to a correlated electron region
AssigneeArm Limited
InventorsCarlos Alberto Paz de Araujo, Jolanta Bozena Celinska, Christopher Randolph McWilliams, Lucian Shifren, Kimberly Gay Reid
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Abstract
Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform a switching function. In embodiments, processes are described in which a correlated electron material film may be formed over a conductive substrate by converting at least a portion of the conductive substrate to CEM.
Claims20
1-23. (canceled)
A method, comprising:
- forming a correlated electron material (CEM) film over a conductive substrate at least in part via oxidizing and/or oxynitridizing at least a portion of the conductive substrate.
A method, comprising:
- forming a second conductive substrate on a first conductive substrate;
- and
- forming a correlated electron material (CEM) film from the second conductive substrate at least in part by converting at least a portion of the second conductive substrate to a CEM.
A method, comprising:
- forming a correlated electron material (CEM) film from at least a first layer of a conductive substrate at least in part by converting at least a portion of the first layer of the conductive substrate to a CEM;
- and
- forming a conductive overlay over the CEM film.
The method of claim 41, wherein the first layer of the conductive substrate comprises one or more d-block elements or one or more f-block elements, or a combination thereof, and wherein the diffusing the atomic or molecular material, or the combination thereof, from the at least the second layer of the conductive substrate to the first layer of the conductive substrate comprises diffusing elemental oxygen, molecular oxygen, elemental nitrogen, or molecular nitrogen, or a combination thereof, from the at least the second layer of the conductive substrate to the first layer of the conductive substrate.
Dependencies are inferred from the claim text.