Electronic device and method for fabricating the same
AssigneeSK hynix Inc.
InventorJin-Won Park
Life of this patent
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Abstract
Provided is an electronic device including a semiconductor memory. The semiconductor memory may include: a variable resistance element that exhibits different resistance states for storing data; and a lower contact plug coupled to the variable resistance element and disposed under the variable resistance element, and wherein a width of the lower contact plug increases from a top surface of the lower contact plug to a bottom surface of the lower contact plug.
Claims20
1-19. (canceled)
A method for fabricating an electronic device including a semiconductor memory, comprising:
- forming a conductive layer over a substrate;
- forming a material layer over the conductive layer;
- forming a variable resistance element by selectively etching the material layer, the selective etching of the material layer causing portions of the conductive layer to be exposed;
- and
- forming a lower contact plug by etching the exposed conductive layer, the lower contact plug being coupled to the variable resistance element under the variable resistance element.
An electronic device comprising a semiconductor memory, wherein the semiconductor memory comprises:
- a substrate including a source region and a drain region;
- stack structures formed over the substrate, each stack structure having a width increasing toward the substrate along a direction perpendicular to a surface of the substrate and including a variable resistance element having a resistance state depending on a voltage or current applied through the variable resistance element and a lower contact plug disposed under the variable resistance element and connecting the variable resistance element to the drain region;
- an upper contact plug formed over the stacked structure to connect the variable resistance element to a bit line;
- and
- a source line contact plug formed over the substrate and connecting the source region to a source line.
Dependencies are inferred from the claim text.