Piezoelectric element and liquid ejecting head
AssigneeSeiko Epson Corporation
InventorsTomohiro SAKAI, Koichi MOROZUMI, Kazuya KITADA, Harunobu KOIKE, Koji SUMI
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorsTomohiro SAKAI, Koichi MOROZUMI, Kazuya KITADA, Harunobu KOIKE, Koji SUMI
Estimating the term…
Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode, containing potassium, sodium, and niobium, and having a perovskite structure, and a second electrode provided above the piezoelectric layer. In a case where the piezoelectric layer is divided into two portions at a center thereof in a thickness direction, the piezoelectric layer includes a first portion on the first electrode side and a second portion on the second electrode side. The piezoelectric layer includes line defects. A density of the line defects in the second portion is higher than a density of the line defects in the first portion.
A piezoelectric element comprising:
Dependencies are inferred from the claim text.