Self-sensing bending actuator

A self-sensing bending actuator, comprising:

• one or more layers of piezoelectric bending elements constructed of PZT-5H material, the piezoelectric bending elements configured to generate a tip displacement therein;
• an insulating layer disposed on at least one of the one or more layers of piezoelectric bending elements, the insulating layer composed of a polyimide material;
• and
• a sensing element disposed on the insulating layer and constructed of one or more of polyvinylidene fluoride and polyvinylidene difluoride (PVDF) material, the sensing element configured to estimate the tip displacement therein.

A self-sensing bending actuator, comprising:

• a support body;
• and
• a stack of layers cantilevered on the support body, the stack of layers comprising:
• a first piezoelectric bending element;
• a second piezoelectric bending element;
• a metallic layer disposed between the first piezoelectric bending element and the second piezoelectric bending element, the metallic layer being electrically coupled to the first piezoelectric bending element and the second piezoelectric bending element;
• an insulating layer disposed on the second piezoelectric bending element;
• and
• a sensing element disposed on the insulating layer.