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US 2019/0198747 A1Published application
Piezoelectric Element, Manufacturing Method Thereof, And Liquid Ejection Head
AssigneeSeiko Epson Corporation
InventorsKazuya KITADA, Masayuki OMOTO, Tsutomu ASAKAWA, Hidemichi FURIHATA
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Abstract
A piezoelectric element includes a substrate; a first electrode formed above the substrate; a piezoelectric layer which contains a composite oxide having a perovskite crystal structure and which is formed above the first electrode; and a second electrode formed above the piezoelectric layer, and the amount of carbon contained in the substrate is 0.26 to less than 14.00 percent by atom.
Claims11
A piezoelectric element comprising:
- a substrate;
- a first electrode formed above the substrate;
- a piezoelectric layer which contains a composite oxide having a perovskite crystal structure and which is formed above the first electrode;
- and
- a second electrode formed above the piezoelectric layer,
- wherein the amount of carbon contained in the substrate is 0.26 to less than 14.00 percent by atom.
3 more elements
A method for manufacturing a piezoelectric element comprising:
- irradiating a substrate with ultraviolet rays;
- forming a first electrode above the substrate;
- forming a piezoelectric layer above the first electrode;
- and
- forming a second electrode above the piezoelectric layer.
2 more elements
Dependencies are inferred from the claim text.