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US 2019/0198686 A1Published application
Photodetector device with integrated high-contrast grating polarizer
AssigneeAms AG
InventorsJens Hofrichter, Jan Enenkel
Life of this patent
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Abstract
The photodetector device comprises a substrate (1) of semiconductor material, a sensor region (2) in the substrate, a plurality of grid elements (4) arranged at a distance (d) from one another above the sensor region, the grid elements having a refractive index, a region of lower refractive index (3), the grid elements being arranged on the region of lower refractive index, and a further region of lower refractive index (5) covering the grid elements.
Claims16
A photodetector device, comprising:
- a substrate of semiconductor material,
- a sensor region in the substrate for the detection of electromagnetic radiation, a plurality of grid elements arranged at a distance (d) from one another above the sensor region, the grid elements having a refractive index,
- a region of lower refractive index, the grid elements being arranged on the region of lower refractive index, and
- a further region of lower refractive index covering the grid elements.
1 more element
A photodetector device, comprising:
- a substrate of semiconductor material;
- a sensor region in the substrate for the detection of electromagnetic radiation;
- a plurality of grid elements arranged at a distance from one another above the sensor region, the grid elements having a refractive index;
- a region of lower refractive index formed in the substrate by a shallow trench isolation, a buried oxide or a field oxide region, the grid elements being arranged on the region of lower refractive index;
- and
- a further region of lower refractive index comprising a dielectric layer, the further region of lower refractive index covering the grid elements.
3 more elements
A photodetector device, comprising:
- a substrate of semiconductor material;
- a sensor region in the substrate for the detection of electromagnetic radiation;
- a plurality of grid elements arranged at a distance from one another above the sensor region, the grid elements having a refractive index;
- a region of lower refractive index formed by a cover layer above the substrate, the grid elements being arranged on the region of lower refractive index;
- and
- a further region of lower refractive index covering the grid elements, the further region of lower refractive index comprising ambient air.
3 more elements
Dependencies are inferred from the claim text.