Programmable Charge Storage Transistor, An Array Of Elevationally Extending Strings Of Memory Cells, And A Method Of Forming An Array Of Elevationally Extending Strings Of Memory Cells
AssigneeMicron Technology, Inc.
InventorsHaitao Liu, Kamal M. Karda, Albert Fayrushin
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Abstract
A programmable charge-storage transistor comprises channel material, insulative charge-passage material, charge-storage material, a control gate, and charge-blocking material between the charge-storage material and the control gate. The charge-blocking material comprises a non-ferroelectric insulator material and a ferroelectric insulator material. Arrays of elevationally-extending strings of memory cells of memory cells are disclosed, including methods of forming such. Other embodiments, including method, are disclosed.
Claims36
A programmable charge-storage transistor comprising:
- channel material;
- insulative charge-passage material;
- charge-storage material;
- a control gate;
- and
- charge-blocking material between the charge-storage material and the control gate, the charge-blocking material comprising:
- a non-ferroelectric insulator material;
- and
- a ferroelectric insulator material.
A programmable charge-storage transistor comprising:
- channel material extending vertically or within 10° of vertical;
- insulative charge-passage material;
- charge-storage material;
- a control gate;
- and
- charge-blocking material between the charge-storage material and the control gate, the charge-blocking material comprising:
- a non-ferroelectric insulator material;
- a ferroelectric insulator material;
- and
- the ferroelectric insulator material and the non-ferroelectric insulator material being directly against one another, the ferroelectric insulator material being thinner than the non-ferroelectric insulator material.
An array of elevationally-extending strings of memory cells, comprising:
- a stack comprising vertically-alternating insulative tiers and wordline tiers, the wordline tiers comprising control-gate material having terminal ends corresponding to control-gate regions of individual memory cells,
- charge-storage material of the individual memory cells extending elevationally along individual of the control-gate regions;
- charge-blocking material of the individual memory cells extending elevationally along the individual control-gate regions between the charge-storage material and the individual control-gate regions, the charge-blocking material comprising:
- a non-ferroelectric insulator material;
- and
- a ferroelectric insulator material;
- transistor channel material of the individual memory cells extending elevationally along the charge-storage material;
- and
- insulative charge-passage material extending elevationally along the charge-storage material between the transistor channel material and the charge-storage material.
A method of forming an array of elevationally-extending strings of memory cells, the method comprising:
- forming a stack comprising vertically-alternating tiers of different composition first and second materials, the first material being insulative;
- forming elevationally-extending channel openings into the alternating tiers;
- forming first charge-blocking insulator material in the channel openings elevationally along the alternating tiers;
- forming charge-storage material in the channel openings elevationally along the alternating tiers and the first charge-blocking insulator material;
- forming insulative charge-passage material in the channel openings elevationally along the alternating tiers and the charge-storage material;
- forming transistor channel material in the channel openings elevationally along the alternating tiers and the insulative charge-passage material;
- removing at least some of the second material from the stack;
- forming second charge-blocking insulator material laterally proximate the first charge-blocking insulator material, the second charge-blocking insulator material being of different composition from that of the first charge-blocking insulator material, one of the first charge-blocking insulator material or the second charge-blocking insulator material comprising a non-ferroelectric insulator material, the other of the first charge-blocking insulator material or the second charge-blocking insulator material comprising a ferroelectric insulator material;
- and
- forming control-gate material laterally over the second charge-blocking insulator material, the control-gate material having terminal ends corresponding to control-gate regions of individual memory cells.
Dependencies are inferred from the claim text.