Fin field-effect transistor for input/output device integrated with nanosheet field-effect transistor

Abstract

A method of forming a semiconductor structure includes forming a nanosheet stack disposed over a first portion of a substrate and a fin channel material disposed over a second portion of the substrate, patterning the nanosheet stack disposed over the first portion of the substrate to form two or more nanosheet channels for at least one nanosheet field-effect transistor, patterning the fin channel material disposed over the second portion of the substrate to form one or more fins for at least one fin field-effect transistor, forming a first dielectric layer surrounding the nanosheet channels and the one or more fins, patterning a mask layer over the one or more fins, removing the first dielectric layer surrounding the nanosheet channels, removing the mask layer, forming a second dielectric layer surrounding the nanosheet channels and over the first dielectric layer surrounding the one or more fins, and forming a gate conductive layer over the second dielectric layer.

Dependencies are inferred from the claim text.