Stacked iii-v semiconductor component
Assignee3-5 Power Electronics GmbH
InventorVolker DUDEK
Life of this patent
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Abstract
A stacked III-V semiconductor component having a p+ region with a top side, a bottom side, and a dopant concentration of 5·1018-5·1020 N/cm3, a first n− layer with a top side and a bottom side, a dopant concentration of 1012-1017 N/cm3, and a layer thickness of 10-300 μm, an n+ region with a top side, a bottom side, and a dopant concentration of at least 1018 N/cm3, wherein the p+ regions, the n− layer, and the n+ region follow one another in the stated order, are each formed monolithically, and each comprise a GaAs compound or consist of a GaAs compound, the n+ region or the p+ region is formed as the substrate layer, and the n− layer comprises chromium with a concentration of at least 1014 N/cm3 or at least 1015 N/cm3.
Claims15
A stacked III-V semiconductor component comprising:
- a p+ region with a top side, a bottom side, and an electrically active dopant concentration of 5·1018-5·1020 N/cm3;
- a first n− layer with a top side and a bottom side, a dopant concentration of 1012-1017 N/cm3, and a layer thickness of 10-300 μm;
- an n+ region with a top side, a bottom side, and a dopant concentration of at least 1018 N/cm3;
- wherein the p+ regions, the n− layer, and the n+ region follow one another and are each formed monolithically, and each comprise a GaAs compound or consist of a GaAs compound,
- wherein the n+ region or the p+ region is formed as a substrate layer, and
- wherein the n− layer comprises defects with a concentration of at least 1014 N/cm3 or at least 1015 N/cm3.
Dependencies are inferred from the claim text.