Field effect transistor with reduced contact resistance
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsRemi COQUAND, Shay REBOH
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Abstract
FET transistor (100) comprising: a semiconductor portion (104) of which a first part (106) forms a channel; a gate (108) at least partly surrounding the first part; internal dielectric spacers (112) arranged around doped second parts (114) of the semiconductor portion between which the first part is arranged and which form extension regions; electrically conductive portions (120) in contact with doped surfaces of extremities (118) of the semiconductor portion and with doped surfaces of third parts (116) of the semiconductor portion, forming part of the source and drain regions, at least partly surrounding the third parts, with each of the second parts being arranged between the first part and one of the third parts.
Claims14
An FET transistor comprising at least:
- a semiconductor portion of which a first part forms a channel of the FET transistor;
- a gate which at least partly surrounds the first part of the semiconductor portion;
- internal dielectric spacers arranged around doped second parts of the semiconductor portion between which the first part of the semiconductor portion is arranged and which form extension regions of the FET transistor;
- electrically conductive portions in contact with doped surfaces of extremities of the semiconductor portion and with doped surfaces of third parts of the semiconductor portion, forming part of source and drain regions of the FET transistor, at least partly surrounding the third parts of the semiconductor portion, with each of the second parts of the semiconductor portion being arranged between the first part of the semiconductor portion and one of the third parts of the semiconductor portion,
- wherein the first part, the second parts, the extremities, and the third parts are all formed from a same material that forms the semiconductor portion.
Dependencies are inferred from the claim text.