Detector architecture using photodetector arrays on thinned substrates
AssigneeVarex Imaging Corporation
InventorsRick E. Colbeth, Ivan P. Mollov
Life of this patent
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Abstract
Some embodiments include a method, comprising: attaching a carrier substrate to a side of at least one semiconductor substrate, the at least one semiconductor substrate including photodetectors on the side; thinning the at least one semiconductor substrate while the at least one semiconductor substrate is attached to the carrier substrate; attaching an optical substrate to the at least one semiconductor substrate while the at least one semiconductor substrate is attached to the carrier substrate; and removing the carrier substrate from the at least one semiconductor substrate.
Claims21
A method, comprising:
- attaching a carrier substrate to a side of at least one semiconductor substrate, the at least one semiconductor substrate including photodetectors on the side;
- thinning the at least one semiconductor substrate while the at least one semiconductor substrate is attached to the carrier substrate;
- attaching an optical substrate to the at least one semiconductor substrate while the at least one semiconductor substrate is attached to the carrier substrate;
- removing the carrier substrate from the at least one semiconductor substrate;
- and
- attaching at least one semiconductor device to the side of the at least one semiconductor substrate after removing the carrier substrate from the at least one semiconductor substrate.
(canceled)
A system, comprising:
- a semiconductor substrate including a plurality of pads and a plurality of photodetectors coupled to the pads on a first side of the semiconductor substrate;
- an optical substrate attached to a second side of the semiconductor substrate opposite to the first side;
- and
- a plurality of separate semiconductor chips separately attached to the pads of the semiconductor substrate.
A system, comprising:
- means for detecting incident illumination;
- means for supporting the means for detecting incident illumination and for optically affecting the incident illumination;
- a plurality of means for processing the detected incident illumination;
- and
- a plurality of means for electrically connecting the means for detecting incident illumination to the plurality of means for processing the detected incident illumination;
- wherein each of the plurality of means for processing the detected incident illumination is separately attached to the means for detecting the incident illumination.
Dependencies are inferred from the claim text.