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US 2019/0198536 A1Published application
Image Sensor and Forming Method Thereof
AssigneeHuaian Imaging Device Manufacturer Corporation
InventorsHuan Wang, Zhiwei Li, Rende Huang
Life of this patent
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Abstract
The present disclosure discloses a low cross talk image sensor and a forming method thereof. The image sensor includes photoelectric diodes; color filter lenses over the photodiodes, barrier structures are formed between two adjacent color filter lenses, and micro lenses. The refractive index of barrier structures is smaller than the refractive index of the color filter lenses.
Claims11
An image sensor, comprising:
- a substrate divided into a plurality of first zones and a plurality of second zones;
- a plurality of photoelectric diodes patterned in a sensor layer on a surface of the substrate, wherein the plurality of photoelectric diodes each is arranged overlapping one of the plurality of first zones;
- an isolation structure disposed on the sensor layer;
- a plurality of color filter lenses disposed on the first isolation layer and aligned to the plurality of photoelectric diodes;
- a plurality of barrier structures each disposed between two adjacent color filter lenses of the plurality of color filter lenses, wherein the plurality of barrier structures align to the plurality of second zones;
- and
- a plurality of micro lenses each on arranged on one of the plurality of color filter lens;
- wherein a refractive index of the plurality of barrier structures is smaller than a refractive index of the plurality of color filter lenses.
5 more elements
A method of forming an image sensor, comprising:
- providing a substrate;
- forming a sensor layer on a surface of the substrate;
- patterning a plurality of photoelectric diodes in the sensor layer;
- forming an isolation structure on the sensor layer;
- forming a plurality of color filter lenses on the isolation structure aligned to the plurality of photoelectric diodes;
- forming a plurality of barrier structures on the isolation structure;
- wherein a refractive index of the barrier structures is smaller than a refractive index of the plurality of color filter lenses;
- and
- forming a micro lens structure on at least one of the plurality of color filter lenses.
6 more elements
Dependencies are inferred from the claim text.