Micro led display panel and manufacturing method thereof
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorZhiwu WANG
Life of this patent
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Abstract
A Micro LED display panel and manufacturing method thereof are provided. The method of manufacturing Micro LED display panel, comprising providing a TFT substrate and opening a channel on the top of TFT substrate for exposing a source or a drain inside; preparing a planar layer on the top of the TFT substrate; opening a countersink hole on the planar layer, preparing a bottom electrode in the countersink hole and the channel; transferring a Micro LED chip to the bottom electrode; preparing a first passivation layer and totally covering the first passivation layer on the surface of the planar layer; opening a via hole on the surface of the first passivation layer for exposing the Micro LED chip; preparing a top electrode in the via hole.
Claims16
A method of manufacturing Micro LED display panel, comprising
- providing a TFT substrate;
- opening a channel which array positioned on a top of the TFT substrate for exposing a source or a drain inside;
- preparing a planar layer on the top of the TFT substrate;
- opening a hole on the planar layer and exposing the source or the drain corresponding to the channel, and forming a countersink hole with inclined inner wall connecting to the channel on the planar layer;
- preparing a bottom electrode in the countersink hole and the channel;
- transferring a Micro LED chip to a bottom surface of the bottom electrode;
- preparing a first passivation layer and totally covering the first passivation layer on the Micro LED chip, the bottom electrode and a top surface of the planar layer;
- opening a via hole on surface of the passivation layer for exposing the Micro LED chip;
- and
- preparing a top electrode in the via hole.
A method of manufacturing Micro LED display panel, comprising
- providing a TFT substrate;
- opening a channel which array positioned on a top of the TFT substrate for exposing a source or a drain inside;
- preparing a planar layer on the top of the TFT substrate, and thickness of the planar layer is 2±1 μm;
- opening a hole on the planar layer and exposing the source or the drain corresponding to the channel, and forming a countersink hole with inclined inner wall connecting to the channel on the planar layer;
- preparing a bottom electrode in the countersink hole and the channel;
- transferring a Micro LED chip to a bottom surface of the bottom electrode;
- preparing a first passivation layer and totally covering the first passivation layer on the Micro LED chip, the bottom electrode and a top surface of the planar layer;
- opening a via hole on surface of the passivation layer for exposing the Micro LED chip;
- and
- preparing a top electrode in the via hole.
A Micro LED display panel, comprising
- a TFT substrate,
- a bottom electrode positioned on top of the TFT substrate,
- a Micro LED chip positioned on the bottom electrode,
- a top electrode positioned on top of the Micro LED chip, and
- a protecting layer covering the TFT substrate and the Micro LED chip,
- wherein the bottom electrodes are arranged as an array on top of the TFT substrate with space between every two adjacent bottom electrodes;
- wherein a bottom of the bottom electrode is extending and conducting with a source or a drain of the TFT substrate, and at least partial of the top electrode is located outside the protecting layer;
- the bottom electrode is a reflective type electrode and each of the bottom electrodes comprises a bottom surface pasting to top surface of the TFT substrate, and a flange positioned around each of the correspondingly Micro LED chips, and the flange is trumpet-shaped.
Dependencies are inferred from the claim text.