Infra-red device
AssigneeAms Sensors UK Limited
InventorsFlorin Udrea, Syed Zeeshan Ali, Richard Henry Hopper, Rainer Minixhofer
Life of this patent
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Abstract
We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.
Claims20
An Infrared (IR) device comprising:
- a first substrate comprising a first cavity;
- a dielectric layer disposed on the first substrate;
- a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity;
- an optically transmissive layer attached to one of the first and second substrates;
- a further layer provided to another of the first and second substrates so that the IR device is substantially closed;
- wherein holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.
Dependencies are inferred from the claim text.