Semiconductor apparatus and manufacturing method thereof

Abstract

The present disclosure discloses a semiconductor apparatus and method of manufacturing. The apparatus includes: a circuit device and a heat sink fin that are disposed in a laminated manner, and a thermal interface material layer located between the circuit device and the heat sink fin. A packaging layer is disposed around a side wall of the circuit device. A first surface of the thermal interface material layer is thermally coupled to the circuit device and the packaging layer, and a second surface is thermally coupled to the heat sink fin. In the foregoing solution, the packaging layer and the circuit device are both thermally coupled to the thermal interface material layer, a contact area between the circuit device and the thermal interface material layer is increased.

Dependencies are inferred from the claim text.