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US 2019/0198379 A1Published application
Chuck table correction method and cutting apparatus
AssigneeDisco Corporation
InventorKazuma SEKIYA
Life of this patent
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Abstract
A chuck table correction method includes the step of: positioning a lower end of a cutting blade, relative to a chuck table, at a predetermined height for cutting into a holding surface; and relatively moving the chuck table and a cutting unit in a processing feeding direction, to cut the holding surface side of the chuck table, thereby forming the chuck table with a corrected surface that functions as a new holding surface.
Claims4
A chuck table correction method for correcting a chuck table provided in a cutting apparatus,
- the cutting apparatus including:
- the chuck table adapted to hold a workpiece by a holding surface;
- a cutting unit adapted to cut the workpiece held by the chuck table by a cutting blade mounted to a spindle;
- a processing feeding unit adapted to relatively move the chuck table and the cutting unit in a processing feeding direction perpendicular to an axis of the spindle;
- an indexing feeding unit adapted to relatively move the chuck table and the cutting unit in an indexing feeding direction parallel to the axis;
- and
- a cutting-in feeding unit adapted to relatively move the chuck table and the cutting unit in a cutting-in feeding direction perpendicular to the processing feeding direction and the indexing feeding direction,
- wherein a lower end of the cutting blade is positioned, relative to the chuck table, at a predetermined height for cutting into the holding surface, and the chuck table and the cutting unit are relatively moved in the processing feeding direction, to cut the holding surface side of the chuck table by the cutting blade, thereby forming the chuck table with a corrected surface that functions as a new one of the holding surface.
5 more elements
A cutting apparatus comprising:
- a chuck table adapted to hold a workpiece by a holding surface;
- a cutting unit adapted to cut the workpiece held by the chuck table by a cutting blade mounted to a spindle;
- a processing feeding unit adapted to relatively move the chuck table and the cutting unit in a processing feeding direction perpendicular to an axis of the spindle;
- an indexing feeding unit adapted to relatively move the chuck table and the cutting unit in an indexing feeding direction parallel to the axis;
- a cutting-in feeding unit adapted to relatively move the chuck table and the cutting unit in a cutting-in feeding direction perpendicular to the processing feeding direction and the indexing feeding direction;
- and
- a control unit adapted to control each component of the cutting apparatus,
- wherein the chuck table includes a suction region having a suction hole for sucking the workpiece, and a peripheral region formed from a conductive non-metallic material and surrounding the suction region, and
- the control unit causes a lower end of the cutting blade to be positioned, relative to the chuck table, at a predetermined height for cutting into the holding surface, and causes the chuck table and the cutting unit to be relatively moved in the processing feeding direction, to cause the cutting blade to cut into the holding surface side of the chuck table, thereby forming the chuck table with a corrected surface that functions as a new one of the holding surface.
6 more elements
Dependencies are inferred from the claim text.