System for dynamically compensating position errors of a sample
AssigneeASML Netherlands B.V.
InventorFangfu LI
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Abstract
Systems and methods are provided for dynamically compensating position errors of a sample. The system can comprise one or more sensing units configured to generate a signal based on a position of a sample and a controller. The controller can be configured to determine the position of the sample based on the signal and in response to the determined position, provide information associated with the determined position for control of one of a first handling unit in a first chamber, a second handling unit in a second chamber, and a beam location unit in the second chamber.
Claims15
A system comprising:
- one or more sensing units configured to generate a signal based on a position of a sample;
- and
- a controller configured to:
- determine the position of the sample based on the signal;
- and
- in response to the determined position, provide information associated with the determined position for control of one of a first handling unit in a first chamber, a second handling unit in a second chamber, and a beam location unit in the second chamber.
A method for determining a position of a sample in an interface between a first chamber and a second chamber, the method comprising:
- generating a signal based on the position of the sample;
- determining the position of the sample based on the signal;
- and
- in response to the determined position, providing information associated with the determined position for control of one of a first handling unit in the first chamber, a second handling unit in the second chamber or a beam location unit in the second chamber.
Dependencies are inferred from the claim text.