Method and device for alignment of substrates

A method for aligning and contacting a first contact face of a first substrate with a second contact face of a second substrate, the method comprising:

• providing a first substrate having a first contact face and a first support face, and a second substrate having a second contact face and a second support face,
• fixing the first support face of the first substrate on a first substrate holder and the second support face of the second substrate on a second substrate holder, said second substrate holder arranged opposite the first substrate holder,
• detecting a first X-Y position, and/or a first alignment orientation of a first alignment marking,
• detecting a second X-Y position, and/or a second alignment orientation of a second alignment marking,
• aligning the first substrate with respect to the second substrate, and
• contacting the first substrate with the second substrate, said first substrate being aligned with respect to the second substrate,
• wherein, before aligning the first substrate with respect to the second substrate, detecting a third X-Y position and/or a third alignment orientation of the first substrate holder and/or the first substrate by use of a third detection unit, by means of which the aligning the first substrate with respect to the second substrate is controlled, wherein (i) the first alignment marking and a third alignment marking are respectively arranged on opposite sides of the first substrate or (ii) the first alignment marking is arranged on a side of the first substrate facing away from the first substrate holder and the third alignment marking is arranged on a side of the first substrate holder facing away from the first substrate.

A device for aligning and contacting a first contact face of a first substrate with a second contact face of a second substrate, said device comprising:

• a first substrate holder for fixing a first support face of the first substrate,
• a second substrate holder for fixing a second support face of the second substrate, said second substrate holder arrangeable opposite the first substrate holder,
• a first detection unit for detecting a first X-Y position and/or a first alignment orientation of a first alignment marking,
• a second detection unit for detecting a second X-Y position and/or a second alignment orientation of a second alignment marking,
• alignment means for aligning the first substrate with respect to the second substrate, and
• contacting means for contacting the first substrate with the second substrate, said first substrate being aligned with respect to the second substrate, and
• a third detection unit for detecting a third X-Y position and/or a third alignment orientation of the first substrate holder and/or the first substrate, by means of which the alignment is controlled,
• wherein (i) the first alignment marking and a third alignment marking are respectively arranged on opposite sides of the first substrate or (ii) the first alignment marking is arranged on a side of the first substrate facing away from the first substrate holder and the third alignment marking is arranged on a side of the first substrate holder facing away from the first substrate.