Substrate processing device

A substrate processing apparatus comprising:

• a plurality of chuck members that grip a substrate horizontally by horizontally clamping the substrate with a plurality of gripping portions arranged around the substrate;
• a spin motor that generates motive power to rotate the substrate about a vertical rotation axis passing through a center portion of the substrate gripped by the plurality of chuck members;
• a spin base that is arranged under the substrate gripped by the plurality of chuck members and transmits the motive power of the spin motor to the plurality of chuck members;
• a processing fluid supply unit that supplies at least one of an upper surface and a lower surface of the substrate with a processing fluid with which the substrate gripped by the plurality of chuck members is processed;
• and
• an IH heating mechanism that includes a heat generating member arranged between the substrate gripped by the plurality of chuck members and the spin base, a heating coil arranged under the spin base, and an IH circuit that causes the heating coil to generate an alternating magnetic field to be applied to the heat generating member by supplying electric power to the heating coil such that the heat generating member generates heat.