Environment maintaining system and method for precision production

An environment maintenance method for precision production, characterized in that it comprises the following steps:

• (a) providing a transport cassette, including a receiving space, a first movable door that can be opened and closed, and a first environment maintenance device, wherein the receiving space bears the plural products to be processed;
• closing the first movable door to seal the receiving space, and operating the first environment maintenance device to maintain a positive pressure environment in the receiving space;
• (b) providing a manufacturing procedure processing device, including a working space, a second movable door that can be opened and closed, an internal transport unit and a second environment maintenance device;
• and operating the second environment maintenance device to maintain a positive pressure and constant temperature/constant humidity environment in the working space;
• (c) using a external transport unit to transport the transport cassette to the manufacturing procedure processing device;
• (d) the first movable door of the transport cassette combined and opened simultaneously with the second movable door of the manufacturing procedure processing device, exposing the receiving space of the transport cassette to the working space of the manufacturing procedure processing device;
• (e) using the internal transport unit to take out the product to be processed in the receiving space and place it in the working space of the manufacturing procedure processing device;
• and
• (f) operating the manufacturing procedure processing device to process the product to be processed.

An environment maintenance system for precision production comprises:

• a transport cassette including a receiving space, a first movable door that can be opened and closed, and a first environment maintenance device, wherein the receiving space is used for bearing one product to be processed at least;
• the first movable door is disposed at one side of the receiving space to seal the receiving space, the first environment maintenance device maintains a positive pressure environment in the receiving space;
• and a manufacturing procedure processing device includes a working space, a second movable door that can be opened and closed, an internal transport unit and a second environment maintenance device, wherein the working space is used to process the product to be processed;
• The second movable door is disposed at one side of the working space;
• when a first movable door of the transport cassette is combined and opened with a second movable door of the manufacturing procedure processing device, the receiving space of the transport cassette is exposed to the working space of the manufacturing procedure processing device;
• the internal transport unit is used to transport back and forth the product to be processed between the receiving space and the working space;
• when the second movable door is closed, a seal is formed in the working space, and the second environment maintenance device maintains a positive pressure and a constant temperature/humidity environment in the working space;
• wherein the first environment maintenance device includes a first air filter unit that maintains a positive pressure environment in the receiving space, the first air filter unit is a fan filter unit, a high pressure pump unit or a chemical filter unit;
• the internal transport unit is a mechanical arm, a roller or a crawler.